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In this paper we present results of an algorithm that has been developed which is sensitive to phase defects of Ø0 on i-line alternating PSMs. This algorithm consists of microcode and software, which can be loaded into existing inspection hardware. The algorithm works in the-to-die inspection mode and uses both transmitted and reflected light images to maximize sensitivity. Isolated phase defects as well as phase defects close to chrome edges were inspected. In addition, the algorithm is able to detect missing and misaligned shifter edges. A programmed phase defect test plate was developed to characterize defect detection sensitivity. Detection of 600 defects smaller than O.75j.tm has been demonstrated with this algorithm. Defect sensitivity characterization and actual production plate defect results are shown. Finally, recent results showing the application of the algorithm to the inspection of Deep-UV multiphase reticles using a shorter (364nm) inspection wavelength are presented.

We present a novel software system that combines design intent as known by EDA designers with defect inspection results from the maskshop to analyze the severity of defects on photomasks. The software -named Takumi DesignDriven Defect Analyzer (TK-D3A)-analyzes defects by combining actions in the image domain with actions in the design domain and outputs amongst others flexible mask-repair decisions in production formats used by the maskshop. Furthermore, TK-D3A outputs clips of layout (GDS/OASIS) that can be viewed with its graphical user interface for easy review of the defects and associated repair decisions. As inputs the system uses reticle defect-inspection data (text and images) and the respective multi-layer design layouts with the definitions of criticalities.The system does not require confidential design data from IDM, Fabless Design House, or Foundry to be sent to the maskshop and it also has minimal impact on the maskshop's mode of operation. The output of TK-D3A is designed to realize value to the maskshop and its customers in the forms of: 1) improved yield, 2) reduction of delivery times of masks to customers, and 3) enhanced utilization of the maskshop's installed tool base.The system was qualified together with a major IDM on a large set of production reticles in the 90 and beyond-65 nm technology nodes of which results will be presented that show the benefits for maskmaking. The accuracy in detecting defects is extremely high. We show the system's capability to analyze defects well below the pixel resolution of all inspection tools used, as well as the capability to extract multiple types of transmission defects. All of these defects are analyzed design-criticality-aware by TK-D3A, resulting in a large fraction of defects that do not need to be repaired because they are located in non-critical or less-critical parts of the layout, or, more importantly, turn out to be repairable or negligible despite of originally being classified as unrepairable when no such criticality knowledge is used. Finally, we show that the runtimes of TK-D3A are relatively short, despite the fact that the system operates on full-chip designs.