The electronic-controlling nanotribological behavior of textured silicon surfaces was investigated by an atomic force microscope (AFM), which were fabricated by laser interference lithography and chemical etching. The results indicated that without an external bias, friction on textured surfaces was greater than that on smooth surfaces and it was related to the coverage rate of the microgrooves. With an external bias, friction on smooth and textured surfaces decreased at first and then increased approximately linearly as the external bias increased.