Dislocations are mobile at low temperatures in surprisingly many ceramics but sintering minimizes their densities. Enabling local plasticity by engineering a high dislocation density is a way to combat short cracks and toughen ceramics.

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This study evaluates the change of flow stress as related to dislocation density in SrTiO3 single crystals in order to provide guidance for later electrical studies. The key parameters varied are temperature and loading rate during the deformation. It is found that in <100>‐oriented SrTiO3 single crystals, the dislocation density is enhanced by plastic deformation, more so at higher temperature as compared to room temperature. The experimental approach of quantifying the dislocation density through a determination of ex situ X‐ray diffraction rocking curves was successfully applied over the upper temperatures region of the lower temperature ductility zone for strontium titanate, i.e., in the so‐called “A‐regime”. For 1.0% deformed samples deformed at 300°C, a fourfold increase in dislocation density to 1.4 × 1013 m−1 was found as compared to the nondeformed state (3.7 × 1012 m−1). Cross‐section techniques confirmed that the observed dislocation densities measured at the surfaces were identical to those seen in the core of the crystals. The use of rapid changes in loading rate provided an estimate for activation volume of the dislocation core for both 25°C and 300°C.