During the past few years, there has been an increasing demand in the field of precision engineering for fine motion in multi-degrees of freedom systems. These applications motivated the development of a new robotics field called microrobotics. In this paper, we review both the design guidelines for microrobots and the advantages of using parallel robots in very high precision applications. Parallel micromanipulators using elastic joints as well as structures manufactured in single solid and metallic bellows are introduced.

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This contribution illustrates with various practical examples an activity at the intersection of MEMS, System Control, Robotics and Ultraprecision Design. The resulting new application domains include Microrobotics, Microfactories and Nanotechnologies.

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