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Porous ceramics are of interest for ultrasonic transducer applications. Porosity allows to decrease acoustical impedance, thus improving transfer of acoustical energy to water or biological tissues. For underwater applications, the d h g h figure of merit can also be improved as compared to dense materials. In the case of high frequency transducers, namely for high resolution medical imaging, thick film technology can be used. The active films are generally porous and this porosity must be controlled. An unpoled porous PZT substrate is also shown to be an interesting solution since it can be used in a screen-printing process and as a backing for the transducer. This paper describes the fabrication process to obtain such materials, presents microstructure analysis as well as functional properties of materials. Modelling is also performed and results are compared to measurements. Finally, transducer issues are addressed through modelling and design of several configurations. The key parameters are identified and their effect on transducer performance is discussed. A comparison with dense materials is performed and results are discussed to highlight in which cases porous piezoceramics can improve transducer performance, and improvements are quantified.

The development towards smaller devices with more functions integrated calls for new and improved manufacturing processes. The screen-printing process is quite well suited for miniaturised and integrated devices, since thick films can be produced in this manner without the need for further machining. On the other hand, the process of screen printing thick films involves potential problems of thermal matching and chemical compatibility at the processing temperatures between the functional film, the substrate and the electrodes. As an example of such a miniaturised device, a MEMS accelerometer based on PZT thick film will be presented. The design and process flow of this accelerometer has been optimised by means of finite element modelling (FEMLAB©). Consequently it has proved possible to eliminate post-processing steps after the screen printing of the PZT thick film.

The introduction of porosity into ferroelectric ceramics has been of great interest in recent years. In particular, studies of porous lead-zirconate-titanate ceramic (PZT) have been made. In the research reported, samples of Ferroperm Pz27 with porosities of 20, 25 and 30% were studied. Very complete measurements were made of all of the physical properties relevant for ferroelectric applications including thermal conductivity and diffusivity, heat capacity, dielectric, pyroelectric, piezoelectric and elastic properties. Scanning electron micrographs indicated a change from 3-0 to 3-3 connectivity with increasing porosity. Although most of the physical properties are degraded by the presence of porosity, both piezoelectric and pyroelectric figures-of-merit are improved because of the markedly reduced relative permittivity. Porous ferroelectric ceramics are very promising materials for a number of applications.