In this work, the working performance of Platinum (Pt), solvent-free nanoparticle (NP)-based strain sensors made on a flexible substrate has been studied. First, a new model has been developed in order to explain sensor behaviour under strain in a more effective manner than what has been previously reported. The proposed model also highlights the difference between sensors based on solvent-free and solvent-based NPs. As a second step, the ability of atomic layer deposition (ALD) developed Al2O3 (alumina) thin films to act as protective coatings against humidity while in adverse conditions (i.e., variations in relative humidity and repeated mechanical stress) has been evaluated. Two different alumina thicknesses (5 and 11 nm) have been tested and their effect on protection against humidity is studied by monitoring sensor resistance. Even in the case of adverse working conditions and for increased mechanical strain (up to 1.2%), it is found that an alumina layer of 11 nm provides sufficient sensor protection, while the proposed model remains valid. This certifies the appropriateness of the proposed strain-sensing technology for demanding applications, such as e-skin and pressure or flow sensing, as well as the possibility of developing a comprehensive computational tool for NP-based devices.

Surface acoustic wave (SAW) resonators are low cost devices that can operate wirelessly on a received radio frequency (RF) signal with no requirement for an additional power source. Multiple SAW resonators operating as transponders that form a wireless sensor network (WSN), often need to operate at tightly spaced, different frequencies inside the industrial, scientific and medical (ISM) bands. This requires nanometer precision in the design and fabrication processes. Here, we present results demonstrating a reliable and repeatable fabrication process that yields at least four arrays on a single 4-inch wafer. Each array consists of four single-port resonators with center frequencies allocated inside four different sub-bands that have less than 50 kHz bandwidth and quality factors exceeding 8000. We see promise of standard, low-cost photolithography techniques being used to fabricate multiple SAW resonators with different center resonances all inside the 433.05 MHz–434.79 MHz ISM band and a mere 100 kHz spacing. We achieved that by leveraging the intrinsic process variation of photolithography and the impact of the metallization ratio and metal thickness in rendering distinct resonant frequencies.