We have investigated the irradiation induced interface mixing in ZnO/SiO2 (α-quartz) and Sb/Ni/Si thin layer systems under swift heavy ion irradiation in the electronic stopping power regime. The irradiations were carried out at 77 K using 100 MeV Ar, 260 MeV Kr, and 200 MeV Xe ions. For the ZnO/SiO2 system experiments were also carried out at lower ion energies (300, 600, and 900 keV, respectively) where nuclear stopping dominates. The alterations of the interface concentration profiles were determined by means of Rutherford backscattering spectrometry performed subsequently at the irradiated and the nonirradiated parts of the samples. While for the semimetal/metal Sb/Ni interface almost no mixing could be found after high-energy irradiation (mixing efficiency for Xe ions: k/Se<0.02 nm5/keV) the ceramic system ZnO/SiO2 strongly reacts upon high energy ion irradiation (Xe: k/Se=2.1 nm5/keV). The Ni/Si interface shows an intermediate effect (Xe: k/Se=0.2 nm5/keV). The mixing behavior found at high ion energies is in contrast to that found in the nuclear stopping regime, where Sb/Ni shows very strong mixing and phase formation while ZnO/SiO2 exhibits only weak ballistic mixing. As was previously observed for the formation of ion tracks, interface mixing due to electronic energy deposition also sets in only if the electronic stopping power exceeds a threshold value.
The epitaxial α-quartz thin film could be a promising material for fabricating optical devices because of its unique optical and mechanical properties and processing advantages compared to bulk materials. This letter reports on the solid-phase epitaxial growth of thin amorphous SiO2 films deposited by electron gun evaporation on single-crystalline α-quartz substrates. This was achieved by high-dose Cs+-ion implantation and subsequent thermal annealing in air. Also, a thin amorphous layer produced by Si+-ion implantation on α-quartz was epitaxially regrown, thus indicating that the epitaxy is independent of the preparation history of the amorphous layer. The results are explained on the basis of network modifications induced by alkali and oxygen in the SiO2 structure.
The migration of oxygen in ion-beam-amorphized c-SiO2 (α-quartz) was investigated by means of nuclear reaction analysis using the resonant reaction O18(p,α)15N for oxygen depth profiling. Only very small amounts of oxygen were observed to diffuse in crystalline or in Xe+-ion beam-amorphized α-quartz after high-temperature annealing. However, a dramatic migration of oxygen occurs in Cs+-implanted α-quartz in the same temperature range (600–900 °C), where Cs diffuses out of the amorphized layer and epitaxial recrystallization occurs. These results point out to a strong correlation of all these processes. A mechanism to explain the observed indiffusion of O18 is proposed and is related to the Cs migration and the topological modification to achieve epitaxial regrowth of the SiO2 matrix.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.