A new fabrication process of ion-exchange waveguides well suited for integrated-sensor applications is presented. The process consists in burying each extremity of the waveguide few microns below the surface while its central region is located at the surface. For a single-mode waveguide at 785 nm, we measured propagation losses of 0.13 dB/cm for the buried portion, 2.80 dB/cm for the surface portion, and losses of 0.40 dB for the transition region. For this structure, we also observed a deformation of the fundamental mode. The proposed method is easy to implement and permits one to control precisely the topography of the elaborated waveguides.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.