Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems.

The sensitivity of an electrostatic transducer determines the range of pulse-echo detection. Maximum sensitivity can be achieved by increasing the bias voltage within certain limits and by using a light membrane. The tension of the membrane was not found to affect the transducer's sensitivity. By using a uniformly grooved backplate the acoustic properties of the transducer can be optimized. The different sensitivity factors of the electrostatic ultrasonic transducer were confirmed with experimental results. High sensitivity can be achieved by using well manufactured backplates with shallow grooves and a small ridge angle.

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