Aiming at the problems of lack of data on the nonlinear morphology to divide uneven grain boundary in bulk ceramics, a unique approach of nanorobot-based characterization of three-dimensional nonlinear structure length can be creatively proposed under scanning electron microscope to quantify the actual morphology of local micro-area grain boundary in bulk ZnO. Contour shapes of the targeted grain boundaries in plane X-Y can be imaged using SEM. Z-directional relative height differences at different positions can be sequentially probed by nanorobot. Experiments demonstrate that it is effective to characterize three-dimensional length structures of nonlinear grain boundaries in bulk materials. By quantifying Z-directional relative height differences, it can be verified to show that irregular characteristics exist in three-dimensional grain boundary length, which can extend the depth effect on nonlinear bulk conductance. Furthermore, this method can also obtain nonlinear quantitative topographies to divide grain boundaries to uneven structure in the analysis of bulk polycrystalline materials.

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Different from focusing on grain boundary upper surface in plane X–Y, a unique approach of nanorobot‐based nondestructive characterization of grain boundary Z‐directional lateral surface within bulk ZnO ceramic can be creatively developed under scanning electron microscope (SEM). By rolling‐over bulk ZnO, two‐dimensional profiles and grain boundaries in Z‐directional lateral surfaces have been imaged in plane Y–Z and individually electrically characterized nondestructively. Experiments demonstrate that it is feasible to realize nondestructive characterization of grain boundary Z‐directional lateral surface structures and electrical properties using nanorobot combined with SEM. Relative height differences between grain boundaries within Z‐directional lateral surface can characterize the relative position relationships. Z‐directional lateral surface structures can further extend irregular grain boundary lengths in plane Y–Z to interpret surface effects of nonlinear electrical properties. Relative minor electrical reactive effects in grain indicate grain boundary dominate in nonlinear macroscopic electrical properties. Furtherly, it can be advanced to promote a nondestructive characterization of grain boundary.