A simple, efficient and scalable method for the atmospheric pressure plasma initiated chemical vapor deposition of conventional polymer is demonstrated. Ultra‐short square pulse dielectric barrier discharge, which allows high deposition rates even for plasma duty cycle as low as 0.01%, is used to deposit a glycidyl methacrylate (GMA) polymer layer. The polymer structure of the thin films is evidenced by matrix‐assisted laser desorption/ionization high‐resolution mass spectrometry. Polymer molecular weights up to 30 000 g mol−1 are found by size exclusion chromatography (SEC), highlighting the suitability of the plasma initiated CVD method for the deposition of polymer layers.
An innovative atmospheric pressure chemical vapor deposition method toward the deposition of polymeric layers has been developed. This latter involves the use of a nanopulsed plasma discharge to initiate the free-radical polymerization of an allyl monomer containing phosphorus (diethylallylphosphate, DEAP) at atmospheric pressure. The polymeric structure of the film is evidence by mass spectrometry. The method, highly suitable for the treatment of natural biopolymer substrate, has been carried out on cotton textile to perform the deposition of an efficient and conformal protective coating.
Plasma polymerization of 3‐aminopropyl‐triethoxysilane (APTES) in microwave late afterglow was studied. First, sol‐gel polymerized APTES was prepared and characterized by ATR–FTIR and XPS. The results obtained were used as a model to define the nature of nitrogen containing groups in the plasma polymer layers. It is shown that the variation of process gas mixture gives the possibility to tailor the chemical composition of the coatings. We show that nitrogen can be present in the thin films as amines, amides, imines or oximes. The analysis of the gas phase composition by OES during the deposition process was realized and based on the correlations established between OES results and thin film compositions, some assumptions on the chemical mechanisms involved in the gas phase are discussed. magnified image
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