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This letter describes a soft lithographic approach for fabricating low-cost, low-loss microlens arrays. An accurate negative reproduction ͑stamp͒ of an existing high-quality lens surface ͑master͒ is made by thermally curing a prepolymer to a silicone elastomer against the master. Fabricating the stamp on a rigid backing plate minimizes distortion of its surface relief. Dispensing a liquid photocurable epoxy loaded to high weight percent with functionalized silica nanoparticles into the features of relief on the mold and then curing this material with UV radiation against a quartz substrate generates a replica lens array. The physical and optical characteristics of the resulting lenses suggest that the approach will be suitable for a range of applications in micro and integrated optics.

In this paper the design of radiation sensitive polymeric imaging systems is reviewed. Advances in design have led to systems that function on the basis of radiation-induced changes in the polarity of polymer repeating units rather than cross-linking. These new systems offer improved resolution, since they do not swell during development. Improvement in sensitivity has been achieved by designing systems that incorporate chemical amplification. The design principles leading to amplification and examples of systems that demonstrate amplification are presented.) unless CC License in place (see abstract). ecsdl.org/site/terms_use address. Redistribution subject to ECS terms of use (see 129.93.24.73 Downloaded on 2015-01-05 to IP

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