Dispersion and radiation properties of the conductor-backed coplanar waveguide (CPW) with finite ground planes are analyzed and modeled. A frequency-domain finite-difference method using the perfectly matched layer absorbing boundary condition is used as reference. Based on these results, a closed-form description is derived and implemented into an existing quasi-static CPW model. This leads to a comprehensive and efficient CPW description accounting for all relevant effects from conductor loss to high-frequency dispersion. Additionally, design rules to avoid parasitic radiation effects are given.
We report on thin-film microstrip lines (TFMSLs) fabricated on low-resistivity Si with polymerized cyclotene as the dielectric between signal and ground conductor, all on top of the wafer. Electro-optic high-frequency characterization of the TFMSLs reveals negligible modal dispersion up to the highest frequencies of 1.0 THz. In spite of the high substrate conductivity, the attenuation is low (⩽1 dB/mm at 100 GHz). Over the full frequency range, it is dominated by conductor losses and not by absorption in the dielectric. With these dispersion and attenuation properties, TFMSLs are an attractive alternative to coplanar waveguides, with the additional advantage of immunity against substrate absorption and radiation losses.
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