Articles you may be interested inThree-dimensional simulations of discharge plasma evolution on a dielectric barrier discharge plasma actuator Effective three-dimensional simulation of field emitter array and its optimal design methodology using an evolution strategy J. Vac. Sci. Technol. B 16, 920 (1998); 10.1116/1.589931Monte Carlo numerical analysis of target erosion and film growth in a threedimensional sputtering chamber A concise review of the basic ideas of the generalized kinematic model of surface evolution during growth and erosion is presented. Interpretation of the main results of this model as well as some specific rules and advice as to how this model is applied in practical simulations are also presented. It is concluded that three-dimensional (3D) computer simulation of surface evolution is only possible by the use of adequate, theoretically motivated numerical methods. As a demonstration, 3D topography simulations during broad and focused ion beam bombardment, chemical vapor deposition, and reactive ion etching using the 3D code DINESE are also presented.

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