Three-dimensional simulation of surface evolution during growth and erosion

Abstract

Articles you may be interested inThree-dimensional simulations of discharge plasma evolution on a dielectric barrier discharge plasma actuator Effective three-dimensional simulation of field emitter array and its optimal design methodology using an evolution strategy J. Vac. Sci. Technol. B 16, 920 (1998); 10.1116/1.589931Monte Carlo numerical analysis of target erosion and film growth in a threedimensional sputtering chamber A concise review of the basic ideas of the generalized kinematic model of surface evolution during growth and erosion is presented. Interpretation of the main results of this model as well as some specific rules and advice as to how this model is applied in practical simulations are also presented. It is concluded that three-dimensional (3D) computer simulation of surface evolution is only possible by the use of adequate, theoretically motivated numerical methods. As a demonstration, 3D topography simulations during broad and focused ion beam bombardment, chemical vapor deposition, and reactive ion etching using the 3D code DINESE are also presented.

Analytical modeling of the transient ablation of a 3D C/C composite

“…such that the function S, which possesses almost everywhere first order partial derivatives, acquires nonzero values at all points not lying on the interface [39]. The function S satisfies the differential equation…”

“…where v e = Ω e J e n is the surface local normal velocity of the surface, with Ω e the solid molar volume of e [39]. The coupled resolution of equations 2, 3, and 4 provides the evolution of the surface roughness and effective reactivity of the composite with time.…”

Atomic-scale effects behind structural instabilities in Si lamellae during ion beam thinning

“…On the one hand, some studies have employed less detailed models based on Monte Carlo simulation of sputtering and redeposition on a three-dimensional grid. 17,18 Unfortunately, such models lack real atomic resolution and hence do not account for, e.g., amorphization, which alone renders them powerless for the topic at hand. On the other hand, previous molecular dynamics (MD) simulations motivated by FIB milling have employed geometries restricted to a single surface with no deformation of the sample allowed, [19][20][21] thus yielding comparatively limited insight into the process.…”

Modelling chemical vapour infiltration of pyrolytic carbon as moving boundary problem

“…However, constant diffusion coefficients, reaction rates being linear in the concentrations and the Gibbs--Thompson law for the movement of the free boundary were assumed. The problem of the spatiotemporal surface evolution of any particular surface for the given normal velocity field has also been treated using generalised kinematic models (Katardjiev et al, 1994). This approach results in the nonlinear hyperbolic Hamilton--Jacobion equations representing Huygens principle of wavefront propagation.…”