A parallel plate discharge, operated in argon in the pressure range p = 0.001 to 1 mbar, was investigated with a special interest on the mechanism of power deposition and on the electron energy distribution function (EEOF). Various diagnostic methods were used in combination in order to obtain a sufficient characterization of the discharge. The predominant channel of power flux was found to change with increasing pressure from Joule-type heating in the plasma bulk to heating by beam-like secondary electrons emitted by the powered electrode. Measured EEOFS differ from Maxwellians and change their shape along the discharge axis.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.