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Abstract. In order to elucidate the effects of nanomechanical stimulation on the regulation of cellular functions, we have been developing a cell culture microdevice integrated with piezoelectric thin film actuators. In this paper, we propose a new geometric configuration of the device to allow cell culture on a relatively flat surface and in an open space. An improved fabrication process for PZT actuators overcame a serious problem that sometimes occurred in the previous process; photoresist patterned on PZT film cannot be completely removed due to its degradation in a dry etching process. Then we demonstrate the driving performance of a fabricated prototype microdevice. Moreover, individual cells can be arranged precisely at the desired positions of the PZT actuators by a positive dielectrophoretic force at frequencies above 100 kHz with an application of an AC voltage of 20 V pp . The trapping rate was dramatically improved up to 90% by using microchannel to efficiently supply cells onto the surface of the PZT actuator.

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