In this work, we have used solvent-free thermo-curable epoxy systems for low-pressure and moderate-temperature nanoimprint lithography (NIL). The curing kinetic parameters and conversion of diglycidyl ether of bisphenol A (DGEBA) resin with different ambient-cure 930 and 954 hardeners were studied by the isothermal DSC technique. They are useful for the study of epoxy resins in the imprinting application. The DGEBA/930 and DGEBA/954 epoxy resists can be imprinted to obtain high-density nano-and micro-scale patterns on a flexible indium tin oxide/poly(ethylene terephthalate) (ITO/PET) substrate. The DGEBA/930 epoxy resin is not only suitable for resist material, but also for plastic mold material. Highly dense nanometer patterns can be successfully imprinted using a UV-curable resist from the DGEBA/930 epoxy mold. Using the replicated DGEBA/930 epoxy mold instead of the expensive master can prevent brittle failure of the silicon molds in the NIL.
In this paper a general result concerning Lagrange's principle for so-called smoothly approximately convex problems is proved which encompasses necessary extremum conditions for mathematical and convex programming, the calculus of variations, Lyapunov problems, and optimal control problems with phase constraints. The problem of local controllability for a dynamical system with phase constraints is also considered. In an appendix, results are presented that relate to the development of a 'Lagrangian approach' to problems where regularity is absent and classical approaches are meaningless.Bibliography: 33 titles.
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