Applying direct growth
and deposition
of optical surfaces holds great promise for the advancement of future
nanophotonic technologies. Here, we report on a chemical vapor deposition
(CVD) technique for depositing amorphous selenium (a-Se) spheres by
desorption of selenium from Bi2Se3 and re-adsorption
on the substrate. We utilize this process to grow scalable, large
area Se spheres on several substrates and characterize their Mie-resonant
response in the mid-infrared (MIR) spectral range. We demonstrate
size-tunable Mie resonances spanning the 2–16 μm spectral
range for single isolated resonators and large area ensembles. We
further demonstrate strong absorption dips of up to 90% in ensembles
of particles in a broad MIR range. Finally, we show that ultra-high-Q
resonances arise in the case where Se Mie-resonators are coupled to
low-loss epsilon-near-zero (ENZ) substrates. These findings demonstrate
the enabling potential of amorphous Selenium as a versatile and tunable
nanophotonic material that may open up avenues for on-chip MIR spectroscopy,
chemical sensing, spectral imaging, and large area metasurface fabrication.
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