X-ray photoelectron spectroscopy was used to determine the level of surface fluorination damage of Ge2Sb2Te5 (GST) etched by fluorocarbon gases at different F/C ratios. When blank GST was etched, the gas with a higher F/C ratio produced a thinner C–F polymer on the etched surface but fluorinated Ge, Sb, and Te compounds were observed in the remaining GST. When the sidewall of the etched GST features was investigated, a thicker fluorinated layer was observed on the GST sidewall etched by the higher F/C ratio gas, indicating more fluorination due to the difficulty in preventing F diffusion into the GST through the thinner C–F layer.

show that the occurrence of photoemissions from electrode or polymer at wavelengths less than about 260 nm is possible, depending on the polarity and amplitude of applied voltage. The photocurrent spectra for samples with circular electrodes characterize two charge de-trapping peaks and the peak at 273 nm is also partially contributed by the photoelectrons from electrode.

In this study, the characterization of the short-circuit current within hundreds of nanoseconds is proposed to study the effect of heat treatment on fast space charge behavior in the polarized biaxially oriented polypropylene (BOPP) films. The BOPP films were cooled either quickly or slowly during the sample preparation. The damped oscillating feature was found in the short-circuit current of all the polarized film samples, but the periods of the oscillating current for the samples prepared by fast cooling rate decrease faster. Bipolar space charge injection in the polarized BOPP films was observed by the thermal pulse (TP) measurement. The variation feature of the short-circuit current was considered to be associated with the varying fast space charge behavior, which depended on the varying structural traps modified by the heat treatment during the sample preparation. The sample subjected to fast cooling process was with relatively shallow trap level revealed by the thermally stimulated current method, which led to higher mobility of the escaping charge in the sample. The TP measurements were utilized to analyze space charge features in the polarized BOPP films.

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