A resonant-type rotating piezoelectric motor with inchworm–inertia composite impact was designed and manufactured. It mainly comprises a stator, rotor, support shaft, and frame. The motor stator includes a clamp, driver, central connecting block, preload structure, and other auxiliary mechanisms. The clamp and driver of the motor work in a resonant state. The motor structure was optimized by using the finite element software COMSOL 5.2. Through the finite element simulation analysis, the first-order bending vibration of the clamp and the driver was selected as the working mode, and the consistency of the resonance frequency coupling was optimized and adjusted. By coordinating the bending vibration of the clamp and driver in the vertical staggered direction, the clamping foot drives the rotor to realize the unidirectional continuous rotation. The motor prototype was designed and processed, while the experimental device platform was established to verify the working principle of the motor, and the comprehensive performance of the motor was analyzed and tested. When the input driving voltage was 240 VP–P, the driving frequency was 161 Hz, and the preload torque of the motor was 6.9 N mm, the maximum no-load speed of the motor reached 3.23 rad/s and the maximum load torque reached 10.35 N mm. Under the same conditions, the maximum resolution of the motor rotation angle was 0.69°.

A resonant-type inertial impact linear piezoelectric motor based on coupling of driving and clamping parts was designed and manufactured. The motor mainly includes stator (coupling of driving and clamping parts), mover (slider) and auxiliary parts. The driving part works in the resonant state under the excitation of single harmonic, which mainly realizes the function of reciprocating driving. Similarly, under the single harmonic driving, the clamping part also works in the resonant state to realize the clamping function. Through the coupling between the two parts of the stator, the mover is driven to move continuously in one direction. The inertial impact piezoelectric motor works in the resonant state because of the driving and clamping parts work in the resonant state respectively. Compared with the traditional quasi-static inertial impact motor, this study changes the working state of the inertial impact motor, which is novel. Through the finite element simulation software COMSOL 5.2, the resonant frequency coupling of the driving and the clamping part is consistent. An experimental platform was built to test the motor prototype to verify the feasibility of the principle. The experiment shows that: The maximum speed reaches 78 mm/s when the motor prototype is operated at the frequency of 810 Hz with a preload of 2 N and the working voltage of clamping and driving parts of motor were set at 80 and 220 Vp-p respectively. Meanwhile, the maximum load of the motor prototype can reach 5 N. The minimum resolution of the motor prototype is 4.733 μm.

A new resonant-type inertial impact piezoelectric motor based on a cam locking mechanism was designed, assembled, and tested. The motor is composed of a stator, a rotor, and other auxiliary components. The cam clamping foot of the stator in contact with the inner surface of the rotor forms a cam locking mechanism, which can make the resonant vibration of the stator effective in a half cycle. By receiving sinusoidal signals, the stator generates bending deformation due to the regular deformation of the piezoelectric plate, which drives the cam clamping foot to move and subsequently causes the rotor to rotate. COMSOL5.4 finite element analysis software was used to design the structure of the piezoelectric motor, and an experimental device was built to evaluate and verify the performance of the motor. The maximum no-load speed of the prototype reached 21.61 rpm and the maximum load torque of the motor was 84 N mm under a driving voltage of 360 Vp–p and a driving frequency of 388 Hz. The motor achieved a net efficiency of 5.6% under a preload torque of 2 N mm with the same condition. The maximum resolution of the motion angle of the new motor prototype was 0.0748° with a driving voltage of 160 Vp–p and the same frequency.