Plasma series resonance (PSR) effect is well known in geometrically asymmetric capacitively couple radio frequency plasma. However, plasma series resonance effect in geometrically symmetric plasma has not been properly investigated. In this work, a theoretical approach is made to investigate the plasma series resonance effect and its influence on Ohmic and stochastic heating in geometrically symmetric discharge. Electrical asymmetry effect by means of dual frequency voltage waveform is applied to excite the plasma series resonance. The results show considerable variation in heating with phase difference between the voltage waveforms, which may be applicable in controlling the plasma parameters in such plasma.
A multiple Faraday cup assembly has been developed for measuring pulsed ion beam of a low energy plasma focus device. The Faraday cups operating in biased ion collector mode have nanosecond response and these have been used to determine the energy spectrum and flux of fast nitrogen ion beam emerging out of the pinched plasma column. The design feature that makes our Faraday cups unique is that they can register ion energy of higher kinetic value (∼hundreds of keV) as well as lower kinetic value (∼keV). It has been possible to register the ion energy upto a lower kinetic energy threshold of ∼5 keV which is a value much lower than that obtained in any previous works. The correlation of the ion beam flux with filling gas pressure is also reported. Angular distribution of ion measurement reveals a highly anisotropic emission indicating an ion dip at the electrode axis.
An investigation of ion beam emission from a low energy plasma focus (PF) device operating with methane is reported. Graphite collectors, operating in the bias ion collector mode, are used to estimate the energy spectrum and ion flux along the PF axis, using the time-of-flight technique. The ion beam signals are time correlated with the emission of soft x-ray pulses from the pinched focus plasma. The correlation of ion beam intensity with filling gas pressure indicates that the beam emission is maximized at the optimum pressure for focus formation at peak current. Ion beam energy correlations for operation in methane indicate that the dominant charge states in carbon ions are C+4 and C+5. The estimated maximum ion energy for H+, C+4 and C+5 are in the range of 200–400 keV, 400–600 keV and 900–1100 keV, respectively, whereas their densities are maximum for the energy range 60–100 keV, 150–250 keV and 350–450 keV, respectively. These results suggest that the ion beams are emitted from a high density, high temperature, short lived focus plasma, at a time which appears to precede the emission of soft x-ray pulses. The properties of the carbon ion beams are discussed in the context of potential applications in materials science.
Self-excited plasma series resonance is observed in low pressure capacitvely coupled radio frequency discharges as high-frequency oscillations superimposed on the normal radio frequency current. This high-frequency contribution to the radio frequency current is generated by a series resonance between the capacitive sheath and the inductive and resistive bulk plasma. In this report, we present an experimental method to measure the plasma series resonance in a capacitively coupled radio frequency argon plasma by modifying the homogeneous discharge model. The homogeneous discharge model is modified by introducing a correction factor to the plasma resistance. Plasma parameters are also calculated by considering the plasma series resonances effect. Experimental measurements show that the self-excitation of the plasma series resonance, which arises in capacitive discharge due to the nonlinear interaction of plasma bulk and sheath, significantly enhances both the Ohmic and stochastic heating. The experimentally measured total dissipation, which is the sum of the Ohmic and stochastic heating, is found to increase significantly with decreasing pressure.
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