Biomimetic compound eyes with a high numerical aperture on a curved surface were successfully fabricated by intelligent integration of traditional top-down and bottom-up micro- and nanofabrication methods together. In addition, the new hybrid micro- and nanofabrication method allows us to fabricate the antireflective nanostructures on each ommatidium to increase its vision sensitivity by improving the light transmission. The fabricated compound eye was optically characterized and was shown to have a numerical aperture of 0.77 for each ommatidium. Furthermore, it is shown that the transmission of the compound eye can be improved by 2.3% for the wavelength of 632.8 nm and a clearer image can be formed by the fabricated compound eye with antireflective nanostructures compared with that without antireflective nanostructures. In addition, the developed hybrid manufacturing method can be adapted to the fabrication of other complex micro- and nanodevices for photonics or other research areas.

Electrohydrodynamic instability patterning (EHDIP) as an alternative patterning method has attracted a great deal of attention over the past decade. This article demonstrates the faithful transfer of patterns with a high aspect ratio onto a polymer film via electrohydrodynamic instabilities for a given patterned grating mask. We perform a simple mathematical analysis to determine the influence of process parameters on the pressure difference ∆P. Through numerical simulation, it is demonstrated that thick films subject to large electric fields are essential to realize this faithful replication. In particular, the influence of the material properties of the polymer on pattern replication is discussed in detail. It is found that, to achieve the smaller periodic patterns with a higher resolution, film with a larger value of the dielectric constant and smaller value of the surface tension should be chosen. In addition, an ideal replication of the mask pattern with a short evolution time is possible by reducing the viscosity of the polymer liquid. Finally, the experiments of the pattern replication with and without defects are demonstrated to compare with the numerical simulation results. It is found that experiments are in good agreement with the simulation results and prove that the numerical simulation method provides an effective way to predict faithful replication.

This article reports the fabrication and characterization of polymeric micro-optical elements on curved substrates using electrostatic induced lithography.