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The potential use of the inclusion complexes of β-cyclodextrins with metal halides as novel precursors in MOCVD applications was examined in terms of microstructure, thermal stability and chemical modifications during heating. The investigation was especially focused on the inclusion complex of β-cyclodextrin with cobalt iodide for cobalt oxide thin film deposition. The general composition assigned to the dextrin's inclusion complex was: (β-CD) 2 • CoI 7• 11H 2 O. It was found that the inclusion complex of β-cyclodextrin with CoI 2 may prove a promising alternative to traditional metalorganic or organometallic Coprecursors for precise CVD applications. The sublimation temperature must be preferably in the range 70-125• C, and the decomposition temperature (substrate temperature) in the range of 350-400• C. Three distinct regions can be recognized by heating: transformation of tightly bound water molecules into easily movable ones, sublimation of iodine ions and Co atoms oscillation and thermal decomposition of the glycositic ring into volatile by-products.