Optical sensitivity is a major issue to improve the sensor responsivity and the spatial resolution of uncooled optomechanical focal plane arrays (FPA). The optical sensitivity is closely related to the mirror length and the undesired mirror deformation induced from the imbalanced residual stresses in different layers. In this paper, the influences of mirror length and deformation on the optical sensitivity are discussed by Fourier Optics. Theoretical analysis and experiments demonstrate that the optical sensitivity is seriously degraded by undesired mirror deformation, and that there exists an optimal mirror length which makes the optical sensitivity achieve its maximum under a certain mirror deformation. Based on the results, an optimized mirror configuration is presented to increase the optical sensitivity of substrate-free bi-material microcantilever array (SFBMA).

The nonlinear frequency conversion of low-temporal-coherent light holds a variety of applications and has attracted considerable interest. However, its physical mechanism remains relatively unexplored, and the conversion efficiency and bandwidth are extremely insufficient. Here, considering the instantaneous broadband characteristic, we establish a model of second harmonic generation (SHG) of low-temporal-coherent pulse, and reveal its differences from the coherent conditions. It is found that the second harmonic (SH) of low-temporal-coherent light is produced by not only the degenerate SH processes but also crossed sum-frequency processes. On the basis of this, we propose a method for realizing low-temporal-coherent SHG with high efficiency and broad bandwidth, and experimentally demonstrate a conversion efficiency up to 70% with a bandwidth of 3.1 THz (2.9 nm centered at 528 nm). To the best of our knowledge, this is the highest efficiency and broadest bandwidth of low-temporal-coherent SHG, and its efficiency is almost the same with that of the narrowband coherent condition. Furthermore, the spectral evolution characteristics of the broadband low-temporal-coherent pulse in SHG process are revealed in experiments, that the SH power spectral density (PSD) is proportional to the self-convolution of the fundamental wave PSD, which is greatly different from that of the coherent process. Our research opens a door for the study of the low-coherent nonlinear optical processes. * These authors contributed equally to this Letter. † liufenggyq@siom.ac.cn

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