The laterally graded multilayer collimator is a vital part of a high-precision diffractometer. It is applied as condensing reflectors to convert divergent X-rays from laboratory X-ray sources into a parallel beam. The thickness of the multilayer film varies with the angle of incidence to guarantee every position on the mirror satisfies the Bragg reflection. In principle, the accuracy of the parameters of the sputtering conditions is essential for achieving a reliable result. In this paper, we proposed a precise method for the fabrication of the laterally graded multilayer based on a planetary motion magnetron sputtering system for film thickness control. This method uses the fast and slow particle model to obtain the particle transport process, and then combines it with the planetary motion magnetron sputtering system to establish the film thickness distribution model. Moreover, the parameters of the sputtering conditions in the model are derived from experimental inversion to improve accuracy. The revolution and rotation of the substrate holder during the final deposition process are achieved by the speed curve calculated according to the model. Measurement results from the X-ray reflection test (XRR) show that the thickness error of the laterally graded multilayer film, coated on a parabolic cylinder Si substrate, is less than 1%, demonstrating the effectiveness of the optimized method for obtaining accurate film thickness distribution.

With the rapid development of optical systems, aspheric reflective optics have become more and more widely used because of their advantages in obtaining better imaging quality. Meanwhile, the optical systems have higher requirements in terms of the surface precision of their optical elements. In this study, we proposed an improved profile-coating method to realize a two-dimensional surface correction method on a rotational symmetric hyperboloid mirror. This method used an irregular mask based on a planetary motion magnetron sputtering system to control film thickness distribution. Moreover, film thickness calibration with a step test was carried out to reduce the processing error of the mask. An optical profiler was used in the step test to quantitatively characterize film thickness distribution and a tilt correction was introduced to correct the test error. As a result, an improvement in figure error in the radial direction of 17.7 nm Root Mean Square (RMS) was achieved. According to these optimization methods, the mask was trimmed for film deposition on the spherical surface. Measurement results from the interferometer show that the figure error of film was 16.23 nm RMS, demonstrating the effectiveness of the optimized method for fabricating a rotational symmetric hyperboloid mirror.