Electrolysis-based micropumps integrated with microfluidic channels in micromachined glass substrates are presented. Photolithography combined with wet chemical etching and thermal bonding enabled the fabrication of multi-layer devices containing electrically actuated micropumps interfaced with sample and mobile phase reservoirs. A stationary phase was deposited on the microchannel walls by coating with 10% (w/w) chlorodimethyloctadecylsilane in toluene. Pressure-balanced injection was implemented by controlling the electrolysis time and voltage applied in the two independent micropumps. Current fluctuations in the micropumps due to the stochastic formation of bubbles on the electrode surfaces were determined to be the main cause of variation between separations. On-chip electrochemical pumping enabled the loading of pL samples with no dead volume between injection and separation. A mobile phase composed of 70% acetonitrile and 30% 50 mM acetate buffer (pH 5.45) was used for the chromatographic separation of three fluorescently labeled amino acids in <40 s with an efficiency of >3000 theoretical plates in a 2.5 cm-long channel. Our results demonstrate the potential of electrochemical micropumps integrated with microchannels to perform rapid chromatographic separations in a microfabricated platform. Importantly, these devices represent a significant step toward the development of miniaturized and fully integrated liquid chromatography systems.

We present a new approach for fabricating multilayer microfluidic devices in poly(methyl methacrylate). Paraffin wax was used as a phase-changing sacrificial layer to protect microstructures during solvent bonding. Microchannels in the top and bottom pieces were aligned with through-holes in the middle layer, resulting in microchannels that cross one another. No discernible delamination of the layers or leakage between channels was observed at pressures as high as 300 psi. The current versus voltage linearity in the crossover channel indicates that no Joule heating occurs at voltages of at least 2.0 kV. Moreover, a potential in the crossover channel did not affect the current in the separation channel. Rapid and efficient separation of fluorescently labeled amino acids was performed in these devices. Pressurized buffer flow or voltage applied in the crossover channel caused no leakage into or electrical interference with the separation channel. Our results demonstrate that sacrificial layers with solvent bonding can be implemented readily in the fabrication of robust and fluidically complex multilayer polymer microchips. These capabilities should facilitate the development of a new generation of sophisticated microfluidic systems.

Electro-osmotic flow (EOF) pumps are attractive for fluid manipulation in microfluidic channels. Open channel EOF pumps can produce high pressures and flow rates, and are relatively easy to fabricate on-chip or integrate with other microfluidic or electrical components. An EOF pump design that is conducive to on-chip fabrication consists of multiple small channel arms feeding into a larger flow channel. We have fabricated this type of pump design using a thin film deposition process that avoids wafer bonding. We have evaluated pumps fabricated on both silicon and glass substrates. Consistent flow rate versus electric field were obtained. For the range of 40-400 V, flow rates of 0.19-2.30 muLmin were measured. Theoretical calculations of pump efficiency were made, as well as calculations of the mechanical power generated by various pump shapes, to investigate design parameters that should improve future pumps.

In order to make the lab-on-a-chip concept a reality, it is desirable to have an integrated component capable of pumping fluids through microchannels. We have developed novel, electrically actuated micropumps and have integrated them with microfluidic systems. These devices utilize the build-up of electrolysis gases to achieve pressure-driven pumping, only require small voltages (approximately 10 V), and have approximate dimensions of 5 cm x 3 cm x 2 cm. Furthermore, these micropumps are composed of relatively inexpensive materials, and the reversible sealability of their poly(dimethylsiloxane) body to different microfluidic arrays enables repeated uses of the same pump. Under an applied potential of 10 V, three different micropumps had average flow rates of 8-13 microL min(-1) for water being pumped through five different 2 cm-long, 5500 microm(2) cross-sectional-area channels in poly(methyl methacrylate), in approximate agreement with predicted pump rates. We have also evaluated pump operation at the lower applied potential of 8 V and observed an average flow rate of 6.1 microL min(-1) for a pump-channel system. The current micropump design is capable of sustaining pumping pressures in the range of 300 kPa. The various advantages of these micropumps make them well suited for use in lab-on-a-chip analysis techniques.

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