Hiroto Kataoka scite author profile

New precursors, 2,2,6,6-tetramethyl-3,5-octanedionato (TMOD) yttrium and neodymium complexes were synthesized for metalorganic chemical vapor deposition (MOCVD). The melting points of the TMOD complexes were much lower than those of the conventional dipivaloylmethanato (DPM) complexes. These complexes can be used in the liquid state where a stable deposition rate can be obtained. It was confirmed that the oxide thin films, Y2O3 and Nd2O3, could be fabricated by an MOCVD method using these complexes.

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Lowering Melting Points of Ruthenium(III) Complexes as Precursors for Metalorganic Chemical Vapor Deposition.

Tasaki¹,

Kataoka²,

Nagami³

et al. 1997

NIPPON KAGAKU KAISHI

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Hiroto Kataoka

Reductive conversion of 5-hydroxymethylfurfural to 1,2,6-hexanetriol in water solvent using supported Pt catalysts

New Liquid Precursors of Yttrium and Neodymium for Metalorganic Chemical Vapor Deposition

Lowering Melting Points of Ruthenium(III) Complexes as Precursors for Metalorganic Chemical Vapor Deposition.

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