The world's highest conversion efficiency levels of 21.8% (Voc: 0.718 V, Isc: 3.852 A, FF: 79.0%, confirmed by AIST) with a practical size of 100.4 cm 2 has been achieved by using the HIT (Hetero-junction with Intrinsic Thin layer) structure. This high efficiency has been mainly realized by the excellent c-Si/a-Si hetero-interface property obtained by our optimized surface cleaning process and high-quality and low-damage a-Si deposition technologies.This excellent c-Si/a-Si hetero-interface of the HIT structure results in a relatively high open circuit voltage (Voc) over 710 mV. Recently, we have succeeded in achieving an outstanding Voc of 730 mV for other efficient HIT solar cells. This result indicates the possibility of further improvement in the conversion efficiency of HIT solar cells. The higher Voc results in not only a higher conversion efficiency but also an improved temperature coefficient, which is another practical advantage for outdoor use.
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