An aperture-area conversion efficiency of 20.0% (intrinsic efficiency: 21 .O%) has been achieved for a 1 .Ocm2 CZ n-type single crystalline silicon (c-Si) solar cell, by using the "HIT (Heterojunction with Intrinsic Thinlayer)" structure on both sides of the cell. This is the world's highest value for a c-Si solar cell in which the junction is fabricated at a low temperature of below 200 'C.In this paper, the junction fabrication technologies and features of the HIT structure are reviewed. The stability under light and thermal exposure, and the temperature dependence on performance of a highefficiency HIT solar cell are also reported.
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