The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.