In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, Prandtl-Ishlinskii (PI) model is used to model the hysteresis nonlinearity. Then, the inverse PI model is used to reduce the hysteresis nonlinearity and a sliding-mode controller is used to compensate the remaining nonlinear uncertainty and disturbances. The piezoelectric-actuated system is modeled as a linear model coupled with a hysteresis. The linear model is identified then it is used to design the sliding-mode controller. Finally, experimental results are presented to verify the usefulness of this method.
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