We present a study of Young’s modulus of epitaxially grown InAs nanowires with diameters from 40 to 95 nm. The dynamic behavior of the nanowires is investigated using optical stroboscopic imaging. The Young’s modulus, evaluated using the eigenfrequencies of the fundamental and the first excited modes in air, decreases for smaller diameters. To avoid the influence of the electric field on the resonance frequency, we use the free ring-down response to a voltage step rather than driving with a harmonic voltage.

A multifunctional NEMS platform based on a mass-producible, surface relief grating has been developed and fabricated directly in polymer materials. The pattern consists of high aspect ratio interdigitated nanometer-sized pairs of walls and can be produced in a low-complexity one-step patterning process with nanoimprint lithography. In this paper, we demonstrate the usefulness of the platform primarily by showing an application as a high-sensitivity mass sensor in air. The sensors, which are based on the high frequency resonant response of around 200 MHz, show a mass responsivity of the order of 0.1 Hz/zg per wall at room temperature and in ambient air. Their ability to selectively adsorb airborne target molecules, such as thiols, is also demonstrated. We also show that the same device can function as a varactor for electronic circuits based on its large tunable capacitive range.

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