We have studied the most promising material of semiconductor nanotechnology BaTiO3. Barium titanate, a compound of barium and titanate oxides, was studied in three dimensional varieties: in the form of powder with a diameter of 1÷1.5 mm, solid BaTiO3 target with a diameter of 76 mm and thin films obtained by ion-plasma sputtering with a thickness d ≈ 10÷50 nm, on the Si (III) surface. The spectra were recorded at room temperature on an XRD-6100 powder X-ray diffractometer, and spectra were taken from room temperature to 673 K, and the amorphous and crystalline phases of this substance were determined based on the obtained X-ray diffraction spectrograms. The peaks of the spectrogram based on the Miller indices and interplanar distances dhkl show complex compounds that are newly formed on the basis of barium titanate.

The main purpose from this paper, in semiconductor technology silicon oxide is to study notable of the surface and catalysis process. As a result, cluster fragmentation processes, we obtained information about the emission of the clusters and the chemical and physical properties of the clusters. We found during the study that oxide clusters are heterogeneous clusters. In heterogeneous clusters, the bonds in the main chain are different from the bonds in the side chain, as in organic polymers. We tried to prove on the basis of the analysis of experimental data that the formation, excitation and molecular decomposition of SinO2n + 1Hk- (k = 1-3) cluster ions are based on the model of the combinatorial synthesis mechanism.

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