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Zinc oxide (ZnO) single crystals were grown by the hydrothermal method using a platinum inner container. The 2 inch ZnO wafers obtained from these bulk crystals possess an extremely high crystallinity and purity. The electrical resistivity is highly uniform over the entire wafer area. After annealing, the step-and-terrace structure was observed on the surface of the wafer. The etch pit density was decreased to less than 80 cm −2 . These results suggest that these 2 inch ZnO wafers are suitable for wide band gap device applications.

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