Abstract. Reconstructing the dielectric permittivity profile (depth dependence of sample dielectric permittivity) is an important inverse problem. We present a new method for permittivity profile reconstruction based on terahertz time-domain spectroscopy signal processing. Reconstruction is accomplished in two steps. First, the sample pulse function is reconstructed using sample time-domain reflection data. Low-and high-frequency noise filtering and the interpolation of the pulse function at low frequencies are then applied. Second, an invariant embedding technique is used to calculate the dielectric permittivity profile based on the sample pulse function. Samples with known permittivity profiles have been studied experimentally using this procedure in order to verify this algorithm. This algorithm is stable to additive Gaussian white noise as shown using mathematical modeling based on the finite-difference time-domain technique. Possible applications of this permittivity profile reconstruction technique are discussed.

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