Micro-Electromechanical Systems (MEMS) have a variety of potential civil and military applications. As MEMS become widely implemented, the application of closed-loop control methods to MEMS will lead to higher degrees of certainty and reliability of microelectromechanical operation in physically demanding environments. This paper presents an overview of recent research and development progress in the area of MEMS control at West Virginia University. The implementation and simulation of a closed-loop stroke-length control of a lateral comb actuator will be presented. The closed-loop scheme implemented is based on a common proportional, integral, derivative (PID) linear feedback control. The position signal of the lateral comb actuator device was obtained using a through-wafer free-space optical probe. The paper will also include further progress in both linear and nonlinear feedback position control schemes.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.
customersupport@researchsolutions.com
10624 S. Eastern Ave., Ste. A-614
Henderson, NV 89052, USA
This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.
Copyright © 2024 scite LLC. All rights reserved.
Made with 💙 for researchers
Part of the Research Solutions Family.