A GaAs/GaAlAs/GaAs/GaAlAs heterostructure has been prepared on a GaAs susbtrate, bonded to 7056 Corning glass, and the substrate and first AlGaAs removed chemically, utilizing the differential etching characteristics of GaAs and AlGaAs in NH4OH−H2O2 and HF solutions. The resulting structure of GaAs/AlGaAs/glass has excellent layer morphology, uniform thickness, and good transmission photocathode performance.
Electron energy loss in the band-bending region of the p-type III–V semiconductor in a III–V photocathode is an important factor in determining the escape probability and the optimum doping. From measurements of photoelectric yield near threshold from Cs2O-activated n-type GaAs, the position of the Fermi level at the GaAs–Cs2O interface was determined for {110}, {100}, {111A}, and {111B} surfaces. Assuming the Fermi-level position at the GaAs surface to be independent of doping, the band bending for p-type GaAs is greatest for the {111A} face and least for the {111B} face. The measured escape probabilities of photoexcited electrons from different crystalline faces of optimally activated 5 × 1018/cm3 Zn-doped liquid epitaxial GaAs correlate well with the band-bending measurements. The {111B} sample has an escape probability of 0.489 and a luminous sensitivity of 1837 μA/lm.
The operational range of the glass-sealed negative-electron-affinity GaAs photocathode has been extended to 3.0 eV by increasing the Al concentration of the GaAlAs passivation layer and decreasing its thickness to approximately 0.3 μm.
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