The resonant frequency of a thickness-shear mode resonator operated in contact with a fluid was measured with a network analyzer and with an oscillator circuit. The network analyzer measures changes in the device's intrinsic resonant frequency, which varies linearly with (ρη)(1/2), where ρ and η are liquid density and viscosity, respectively. The resonator/oscillator combination, however, responds differently to liquid loading than the resonator alone. By applying the operating constraints of the oscillator to an equivalent-circuit model for the liquid-loaded resonator, the response of the resonator/oscillator pair can be determined. By properly tuning the resonator/oscillator pair, the dynamic range of the response can be extended and made more linear, closely tracking the response of the resonator alone. This allows the system to measure higher viscosity and higher density liquids with greater accuracy.

A flexural plate wave resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived which characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the device's response to changes in dc magnetic field strength, ambient gas composition, gas pressure, and input power. ͓S0021-8979͑98͒05709-0͔

A survey is made of acoustic devices that are suitable as gas and vapor sensors. This survey focuses on attributes such as operating frequency, mass sensitivity, quality factor (Q), and their ability to be fabricated on a semiconductor substrate to allow integration with electronic circuitry.The treatment of the device surface with chemically-sensitive films to detect species of interest is discussed. Strategies for improving discrimination are described, including sensor arrays and species concentration and separation schemes. The advantages and disadvantages of integrating sensors with microelectronics are considered, along with the effect on sensitivity of scaling acoustic gas sensors to smaller size.

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