VLSI compatible optical waveguides on silicon are currently of particular interest in order to integrate optical elements onto silicon chips, and for possible replacements of electrical cross-chip/inter-core interconnects. Here we present simulation and experimental verification of a hybrid plasmon/dielectric, single-mode, single-polarization waveguide for silicon-on-insulator wafers. Its fabrication is compatible with VLSI processing techniques, and it possesses desirable properties such as the absence of birefringence and low sensitivity to surface roughness and metallic losses. The waveguide structure naturally forms an MOS capacitor, possibly useful for active device integration. Simulations predict very long propagation lengths of millimeter scale with micron scale confinement, or sub-micron scale confinement with propagation lengths still in excess of 100 microns. The waveguide may be tuned continuously between these states using standard VLSI processing. Extremely long propagation lengths have been simulated: one configuration presented here has a simulated propagation length of 34 cm.

Absorption spectroscopy in the long wave infrared provides an effective method for identification of various hazardous chemicals. We present a theoretical design for plasmonic band-pass filters that can be used to provide wavelength selectivity for uncooled microbolometer sensors. The microfilters consist of a pair of input reflection gratings that couple light into a plasmonic waveguide with a central resonant waveguide cavity. An output transmission grating on the other side of the structure pulls light out of the waveguide where it is detected by a closely spaced sensor. Fabrication of the filters can be performed using standard photolithography procedures. A spectral bandpass with a full-width at half-maximum (FWHM) of 100 nm can be obtained with a center wavelength spanning the entire 8–12 μm atmospheric transmission window by simple geometric scaling of only the lateral dimensions. This allows the simultaneous fabrication of all the wavelength filters needed for a full spectrometer on a chip.