Plasmonic Band-Pass Microfilters for LWIR Absorption Spectroscopy

Banks, J. M.; Flammer, P. D.; Furtak, T. E.; Hollingsworth, R. E.; Collins, Reuben

doi:10.1155/2012/916482

Cited by 3 publications

(3 citation statements)

References 21 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Nevertheless, many researches on IR spectrometer operating in LWIR have been studied to apply a broad range of environmental pollutant detection system such as gas, liquid and solid material analysis. [19][20][21][22][23][24][25][26] To fabricate a flat air etalon gap more than 7 µm between reflectors, we developed a novel poly(dimethylsiloxane) (PDMS) micro patterning technique by combining photolithography and dry etching, and applied to the proposed FPIbased LWIR spectrometer. By using the proposed PDMS micro patterning technique, a clear PDMS patterns could be achieved without damage to Si substrate.…”

Section: Introductionmentioning

confidence: 99%

A Fabry–Perot interferometer-based long-wavelength infrared spectrometer utilizing a novel PDMS patterning technique

Jung¹,

Kim²,

Baek³

et al. 2015

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

We report a Fabry–Perot interferometer (FPI)-based infrared (IR) spectrometer designed for long-wavelength infrared (LWIR) region. To fabricate the proposed FPI-based LWIR spectrometer, we developed a novel poly(dimethylsiloxane) (PDMS) patterning technique by combining photolithography and dry etching. The proposed PDMS patterning technique has advantages such as clear shape of PDMS pattern and no damage to the silicon (Si) substrate. Especially, the final height of PDMS pattern is easily adjusted by controlling the thickness of spin-coated photoresist. The proposed FPI-based IR spectrometer, which is composed of upper and lower substrate were fabricated separately utilizing newly proposed PDMS patterning technique. Experimental results show that maximum transmittance of filtered wavelength component by the proposed FPI-based IR spectrometer lies at the wavelength of 16 µm. The proposed IR spectrometer can detect a specific wavelength at LWIR region by controlling the air etalon gap that is adjusted by utilizing the proposed PDMS patterning technique.

show abstract

Section: Introductionmentioning

confidence: 99%

A Fabry–Perot interferometer-based long-wavelength infrared spectrometer utilizing a novel PDMS patterning technique

Jung¹,

Kim²,

Baek³

et al. 2015

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…It is worth pointing out that this perforated metal film structure unconditionally needs to play with the quantum dots (QDs)-based IR detectors [ 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 ] for spectral-shaping and photocurrent enhancement, which is caused by the anisotropic dielectric constants of the active layer, specifically, the different absorption efficiencies of active layer into x - or y -direction (lying in the plane of perforated metal film) and z -direction (along the growth direction) [ 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 ]. It is also worth referring to research on a hybrid device consisting of artificial structure and thermal detector (that can operate at or even above room temperature without cryogenic cooling), which has seen impressive growth, exhibiting the spectral selectivity at the desired wavelength [ 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 , 58 ]. Over the past years, there have been experimental efforts to demonstrate the change of peak wavelength photoresponse at a fixed bias by structural tuning of plasmonic structure (e.g., periodicity or aperture size) [ 38 , 43 , 44 , 45 ].…”

Section: Introductionmentioning

confidence: 99%

Plasmonic-Layered InAs/InGaAs Quantum-Dots-in-a-Well Pixel Detector for Spectral-Shaping and Photocurrent Enhancement

Hwang

Jeon

et al. 2020

Nanomaterials

View full text Add to dashboard Cite

The algorithmic spectrometry as an alternative to traditional approaches has the potential to become the next generation of infrared (IR) spectral sensing technology, which is free of physical optical filters, and only a very small number of data are required from the IR detector. A key requirement is that the detector spectral responses must be engineered to create an optimal basis that efficiently synthesizes spectral information. Light manipulation through metal perforated with a two-dimensional square array of subwavelength holes provides remarkable opportunities to harness the detector response in a way that is incorporated into the detector. Instead of previous experimental efforts mainly focusing on the change over the resonance wavelength by tuning the geometrical parameters of the plasmonic layer, we experimentally and numerically demonstrate the capability for the control over the shape of bias-tunable response spectra using a fixed plasmonic structure as well as the detector sensitivity improvement, which is enabled by the anisotropic dielectric constants of the quantum dots-in-a-well (DWELL) absorber and the presence of electric field along the growth direction. Our work will pave the way for the development of an intelligent IR detector, which is capable of direct viewing of spectral information without utilizing any intervening the spectral filters.

show abstract

“…Therefore, in recent years, various studies have focused on IR detection sensors using IR spectrometry [ 1 , 2 , 3 ]. Among them, some studies focus on the tunable Fabry-Perot interferometer (TFPI) to finely control the wavelength range while using optical filters [ 4 , 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force

Jung

Lee

Kim

et al. 2018

Sensors

View full text Add to dashboard Cite

A tunable Fabry-Perot interferometer (TFPI)-type wavelength filter designed for the long-wavelength infrared (LWIR) region is fabricated using micro electro mechanical systems (MEMS) technology and the novel polydimethylsiloxane (PDMS) micro patterning technique. The structure of the proposed infrared sensor consists of a Fabry-Perot interferometer (FPI)-based optical filter and infrared (IR) detector. An amorphous Si-based thermal IR detector is located under the FPI-based optical filter to detect the IR-rays filtered by the FPI. The filtered IR wavelength is selected according to the air etalon gap between reflectors, which is defined by the thickness of the patterned PDMS. The 8 μm-thick PDMS pattern is fabricated on a 3 nm-thick Al layer used as a reflector. The air etalon gap is changed using the electromagnetic force between the permanent magnet and solenoid. The measured PDMS gap height is about 2 μm, ranging from 8 μm to 6 μm, with driving current varying from 0 mA to 600 mA, resulting in a tunable wavelength range of 4 μm. The 3-dB bandwidth (full width at half maximum, FWHM) of the proposed filter is 1.5 nm, while the Free Spectral Range (FSR) is 8 μm. Experimental results show that the proposed TFPI can detect a specific wavelength at the long LWIR region.

show abstract

Plasmonic Band-Pass Microfilters for LWIR Absorption Spectroscopy

Cited by 3 publications

References 21 publications

A Fabry–Perot interferometer-based long-wavelength infrared spectrometer utilizing a novel PDMS patterning technique

A Fabry–Perot interferometer-based long-wavelength infrared spectrometer utilizing a novel PDMS patterning technique

Plasmonic-Layered InAs/InGaAs Quantum-Dots-in-a-Well Pixel Detector for Spectral-Shaping and Photocurrent Enhancement

Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force

Contact Info

Product

Resources

About