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Determination of microstructure torque is becoming of increasing importance for MEMS sensors and actuators. The micro-torque estimation for a rotary micro motor, assuming the availability of a MEMS optical monitoring data stream, is presented. The estimation technique is based on sliding mode. The dynamic model of the rotating MEMS system and the electrostatic torque is identi3ed. The technique uses the estimated position signal to approach the actual measured position signal obtained from optical monitoring, meanwhile estimating the micro-torque and load torque. Both estimated micro-torque and load torque are low pass filtered to eliminate the switching behavior inherent in the sliding mode estimator. The simulation results of both electrostatic and load torques estimations are presented.drive the system to the sliding surface. The estimated signal is passed through a low pass filter to eliminate unwanted high frequency switching effects. The simulation results of estimating electrostatic and load torques are presented for rotary electrostatic microengines. The experimental results of estimating force for the Lateral Comb Resonator are also presented. THE DYNAMIC MODEL OF THE SYSTEM The Rotary MEMSThe rotating MEMS dynamic model for one stator and rotor can be represented with a second order differential equation respect to rotor angle, x [5]where Keywords