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A capacitive-type MEMS acoustic sensor with a planarised TiN/plasma-enhanced chemical vapour deposition-Si 3 N 4 /TiN diaphragm based on a polyimide sacrificial layer is presented. The multi-layer diaphragm has the effective residual stress of +31.5 MPa. Furthermore, this sensor features a 21% lower parasitic capacitance and a 56% lower air-gap resistance in comparison with those of a sensor fabricated without planarisation. Five photomasks were used. In addition, to evaluate the frequency response, both an effective capacitance model and an equivalent circuit model equipped with a voltage-controlled voltage source are newly proposed and compared with conventional models. The open-circuit sensitivity is modelled to −45.4 dBV/Pa at 1 kHz with 9.6 V, indicating a difference of 0.9 dB in comparison with the open-circuit sensitivity of the conventional model.

We present evidence for soft gluon interference, as required by QCD. This interference is expected to manifest itself in an angular ordering of the gluons radiated within a jet. Using hadronic decays of the Z boson in the L3 detector at LEP, we compare variables sensitive to such an angular ordering, namely the energy-energy correlation asymmetry and the newly introduced particle-particle correlation asymmetry, with the predictions of various parton shower models. Only those models which incorporate the expected interference agree with the data.

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