Thanks to their portability and the non‐equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non‐equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high‐pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas.

Cold atmospheric pressure helium plasma jets are increasingly used in many processing applications, due to a distinct combination of their inherent plasma stability with excellent reaction chemistry often enhanced downstream. Despite their widespread usage, it remains largely unknown whether cold atmospheric plasma jets maintain similar characteristics from breakdown to arcing or whether they possess different operating modes. In addition to their known ability to produce a fast moving train of discrete luminous clusters along the jet length, commonly known as plasma bullets, this paper reports evidence of two additional modes of operation, namely a chaotic mode and a continuous mode in an atmospheric helium plasma jet. Through detailed electrical and optical characterisation, it is shown that immediately following breakdown the plasma jet operates in a deterministic chaotic mode. With increasing input power, the discharge becomes periodic and the jet plasma is found to produce at least one strong plasma bullet every cycle of the applied voltage. Further increase in input power eventually leads to the continuous mode in which excited species are seen to remain within the inter-electrode space throughout the entire cycle of the applied voltage.Transition from the chaotic, through the bullet, to the continuous modes is abrupt and distinct, with each mode having a unique set of operating characteristics. For the bullet mode, direct evidence is presented to demonstrate that the evolution of the plasma jet involves a repeated sequence of generation, collapse and regeneration of the plasma head occurring at locations progressively towards the instantaneous cathode. These offer previously unavailable insight into plasma jet formation mechanisms and the potential of matching plasma jet modes to specific needs of a given processing application.

Electron density is one of the key parameters in the physics of a gas discharge. In this contribution the application of the Stark broadening method to determine the electron density in low temperature atmospheric pressure plasma jets is discussed. An overview of the available theoretical Stark broadening calculations of hydrogenated and non-hydrogenated atomic lines is presented. The difficulty in the evaluation of the fine structure splitting of lines, which is important at low electron density, is analysed and recommendations on the applicability of the method for low ionization degree plasmas are given. Different emission line broadening mechanisms under atmospheric pressure conditions are discussed and an experimental line profile fitting procedure for the determination of the Stark broadening contribution is suggested. Available experimental data is carefully analysed for the Stark broadening of lines in plasma jets excited over a wide range of frequencies from dc to MW and pulsed mode. Finally, recommendations are given concerning the application of the Stark broadening technique for the estimation of the electron density under typical conditions of plasma jets.

Pulsed excitation of cold atmospheric plasmas is commonly believed to offer valuable benefits compared to the mainstream sinusoidal excitation. However, direct comparison of pulsed and sinusoidal atmospheric plasmas remains few, if any, thus casting an uncertainty of whether pulsed excitation facilitates any significant advantage. In this letter, we report a comparison study of pulsed and sinusoidal cold atmospheric plasma jets through electrical characterization, gas temperature measurement, and optical detection of reactive plasma species. An example of pulsed excitation is shown to reduce the electrical energy consumption by a factor of 12 for producing the same amount of oxygen atoms.

This letter reports an experimental study of two types of atmospheric pressure plasma jets in terms of their fundamental properties and their efficiency in etching polymeric materials. The first plasma jet has a cross-field configuration with its electric field perpendicular to its gas flow field, whereas the second is a linear-field device having parallel electric and flow fields. The linear-field jet is shown to drive electron transportation to the downstream application region, thus facilitating more active plasma chemistry there. This is responsible for its etching rate of polyamide films being 13-fold that of its cross-field counterpart.