To considerably improve the conversion efficiency of industrial solar cells, the effective passivation of the rear surface is a prerequisite. Thermal grown silicon oxides provide an excellent level of surface passivation on lowly doped p-type surfaces. However, dry thermal oxidation processes require relatively high temperatures (?1000°C) and, due to the low growth rate, long process times. To decrease both oxidation temperature and process time, the dry oxidation process can be replaced by a wet oxidation. The most common way to introduce high purity water vapor into the oxidation tube is the pyrolytic generation from high purity gases (H2 and O2). A more easy and cost effective option for the supply of water vapor that was applied within this work is the direct purification of steam. The passivation quality of dry and wet oxides, the latter grown from pyrolytic generated water vapor and purified steam was compared within this work. The passivation quality obtained for the wet oxides grown from purified steam was found to be comparable to those oxides grown from pyrolytic generated water vapor. On laser fired contacts (LFC) solar cells conversion efficiencies well above 20% could be achieved independent of the oxide that was applied for the rear side passivation
The most common problem following primary flexor tendon repair is the failure of the tendon apparatus to glide, secondary to the formation of adhesions. Early motion following tendon repair has been shown to be effective in reducing adhesions between the tendon and the surrounding sheath. Therefore, it is important to determine the amount of flexor tendon excursion along the digit during joint motion. In this study, the excursion between the flexor digitorum profundus (FDP) tendon and the sheath was examined in both human and canine digits. Based on roentgenographic measurements and joint kinematic analysis, the motion of the bones, the FDP tendon, and the sheath were measured with respect to joint rotations. It was found that the canine flexor tendon apparatus behaved similarly to that of the human for the motions studied. The amount of tendon excursion was very small in regions distal to the joint in motion (approximately 0.1 mm/10 degrees of joint rotation). There was little displacement of the sheath (0.2-0.3 mm), except at the metacarpal joint region during metacarpophalangeal (MCP) joint motion and at the proximal interphalangeal (PIP) joint region during PIP joint motion. Tendon excursion relative to the tendon sheath was the largest in zone II during PIP joint rotation (1.7 mm/10 degrees of joint rotation). These results suggest that PIP joint motion may be most effective in reducing adhesions following tendon repair in zone II.
In this Letter, the robust ferroelectric properties of low-temperature (350 °C) Hf0.5Zr0.5O2 (HZO) films are investigated. We demonstrate that the lower crystallization temperature of HZO films originates from a densified film deposition with an anhydrous H2O2 oxidant in the atomic layer deposition process. As a consequence of this densification, H2O2-based HZO films showed completely crystallinity with fewer defects at a lower annealing temperature of 350 °C. This reduction in the crystallization temperature additionally suppresses the oxidation of TiN electrodes, thereby improving device reliability. The low-temperature crystallization process produces an H2O2-based HZO capacitor with a high remanent polarization ( Pr), reduced leakage current, high breakdown voltage, and better endurance. Furthermore, while an O3-based HZO capacitor requires wake-up cycling to achieve stable Pr, the H2O2-based HZO capacitor demonstrates a significantly reduced wake-up nature. Anhydrous H2O2 oxidant enables the fabrication of a more reliable ferroelectric HZO device using a low process thermal budget (350 °C).
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