No abstract

We provide evidence for a high-pressure phase transformation (HPPT) in the ceramic material silicon nitride. This HPPT is inferred by a high-pressure diamond anvil cell, Raman spectroscopy, scanning/transmission electron microscopy, and optical and acoustic microscope inspection. In the case of silicon nitride, the HPPT involves a ductile or metallike behavior that is observed in severe deformation processes, such as nanoindentation and micromachining. This pressure-induced plasticity is believed to be similar to that found in silicon and germanium with its origin in the high-pressure metallic β-Sn phase formation.

The xenon plasma focused ion beam instrument (PFIB), holds significant promise in expanding the applications of focused ion beams in new technology thrust areas. In this paper, we have explored the operational characteristics of a Tescan FERA3 XMH PFIB instrument with the aim of meeting current and future challenges in the semiconductor industry. A two part approach, with the first part aimed at optimizing the ion column and the second optimizing specimen preparation, has been undertaken. Detailed studies characterizing the ion column, optimizing for high-current/high mill rate activities, have been described to support a better understanding of the PFIB. In addition, a novel single-crystal sacrificial mask method has been developed and implemented for use in the PFIB. Using this combined approach, we have achieved high-quality images with minimal artifacts, while retaining the shorter throughput times of the PFIB. Although the work presented in this paper has been performed on a specific instrument, the authors hope that these studies will provide general insight to direct further improvement of PFIB design and applications.

Although it has been confirmed by diamond anvil cell experiments that germanium transforms under hydrostatic pressure from the normal diamond cubic phase (Ge-I) to the metallic β-tin phase (Ge-II) and re-transforms to Ge-III (ST12 structure) or Ge-IV (BC8 structure) during release of the pressure, there are still controversies about whether the same transformations occur during nanoindentation. Here, we present new evidence of indentation-induced phase transformations in germanium. Nanoindentation experiments were performed on a (100) Ge single crystal using two triangular pyramidal indenters with different tip angles - the common Berkovich and the sharper cube-corner. Although the indentation load-displacement curves do not show any of the characteristics of phase transformation that are well-known for silicon, micro-Raman spectroscopy in conjunction with scanning electron microscopy reveals that phase transformations to amorphous and metastable crystalline phases do indeed occur. However, the transformations are observed reproducibly only for the cube-corner indenter.

Although it has been confirmed by diamond anvil cell experiments that germanium transforms under hydrostatic pressure from the normal diamond cubic phase (Ge-I) to the metallic β-tin phase (Ge-II) and re-transforms to Ge-III (ST12 structure) or Ge-IV (BC8 structure) during release of the pressure, there are still controversies about whether the same transformations occur during nanoindentation. Here, we present new evidence of indentation-induced phase transformations in germanium. Nanoindentation experiments were performed on a (100) Ge single crystal using two triangular pyramidal indenters with different tip angles - the common Berkovich and the sharper cube-corner. Although the indentation load-displacement curves do not show any of the characteristics of phase transformation that are well-known for silicon, micro-Raman spectroscopy in conjunction with scanning electron microscopy reveals that phase transformations to amorphous and metastable crystalline phases do indeed occur. However, the transformations are observed reproducibly only for the cube-corner indenter.