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The integration of nanoscale features over macroscopic surface areas is a major challenge for traditional lithography. The vast majority of lithographic methods in use today either require the focusing of an incident beam onto a small area in order to minimize feature sizes in a parallel process or are based on a sequential process, [1] limiting either the minimum feature size or the throughput.[2] Even microcontact printing [3] and nanoimprint lithography [4] require the fabrication of a master. Self-organizing lithographic methods such as colloidal projections [5] (also known as ªnatural lithographyº [6] ), block-copolymer lithography [7±9] or the use of biomolecular arrays as lithographic resists [10] are exceptions in that they are capable of rapidly patterning a large area with lateral resolution in the nanometer range, albeit with limited complexity. The Langmuir±Blodgett (LB) [11] technique, in particular, has been used to prepare selforganized films of diblock copolymer micelles.[12] Furthermore, hierarchical arrays of aligned nanowires have been produced through a combination of LB film preparation with reactive ion etching (RIE) or photolithography. [13,14] Here we present methods to integrate complex LB patterns with nanometer-sized featured over macroscopic areas, e.g., 4 in. (1 in. = 2.54 cm) silicon wafers. We apply these self-pat-

We design and manufacture the gas micropreconcentrator in low temperature cofired ceramics (LTCC) technology. The structure is 1.2-mm thick and has lateral dimensions of 25 × 20 mm. It consists of eight layers of LTCC green tapes with spiral-shaped channel filled with absorbing powder. Two heaters covered by the ceramic foils are embedded over and below the channel. The heaters are required for heating the adsorbent to elevated temperatures during its activation and desorption processes. In this paper, we describe the fabrication processes of a micropreconcentrator structure designed for acetone detection applications together with thermal and preconcentration measurements of the device. Commercially available adsorbents: Carboxen-1018, Carboxen-1012, and Carboxen-1003 from Sigma-Aldrich are selected and tested in order to concentrate low levels of acetone. The best concentration factor obtained is 5250.

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Metamaterial transmission lines can be realized as a combination of transmission line sections with positive and negative dispersion. Such lines, which are also known as right-and left-handed transmission lines, exhibit different dispersion characteristics. Compared to homogeneous networks, the use of cascaded line sections gives additional degrees of freedom for improving the performance of microwave devices. For the design process, LC-equivalents of the right-and left-handed transmission line sections are used. This facilitates the consideration of tunable capacitors, e.g., varactor diodes, to provide frequency tuning of the devices. At the same time, the geometrical dimensions of the devices can be drastically reduced. This paper presents the results of simulation and experimental investigation of a miniature rat-race-ring and a dual-band filter free of spurious response, both manufactured as fully-integrated ceramic multilayer modules based on Low-Temperature Co-fired Ceramics. The design of tunable versions of these devices is also discussed.