In this paper, we present novel micro-electro-mechanical systems (MEMS) devices for unique probe recording technology, where the 1-D cantilever probe array approach requires a small number of cantilever probe tips for a large media platform and hence has higher reliability. The probe storage system is composed of three key MEMS devices: MEMS XYstage, linear motor and 1-D cantilever probe array with integrated heater. The design and fabrication process of three MEMS devices are given with prototypes. Their performances are discussed with the experimental results. The compact MEMS XY-stage device can be driven with ±20 lm movement, in X-and Ydirections. The miniature linear motor is smoothly driven to move back and forth at the speed of 20 mm/s and step of 150 lm by 150 mA pulse driving current. The indented (writing) bit size of 100 nm on polymer media is achieved by the prototyped cantilever probe tip with integrated heater.

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