Design, Fabrication and Control of a Micro X-Y Stage with Large Ultra-Thin Film Recoding Media Platform

Lü, Yi; Pang, Chee Khiang; Chen, J.; Zhu, Hong; Yang, Jun; Mou, Jianqiang; Guo, G. X.; Chen, B.M.; Lee, T.H.

doi:10.1109/aim.2005.1500959

Cited by 13 publications

(15 citation statements)

References 7 publications

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“…2. It consists of a movable media platform, comb-drive actuators, X and Y suspensions, springs and stationary parts (Mou et al 2005;Lu et al 2005). The media platform is connected to the suspensions via supporting beams, and the suspensions are connected to the anchors through the folded springs.…”

Section: Introductionmentioning

confidence: 99%

Probe recording technology using novel MEMS devices

et al. 2006

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In this paper, we present novel micro-electro-mechanical systems (MEMS) devices for unique probe recording technology, where the 1-D cantilever probe array approach requires a small number of cantilever probe tips for a large media platform and hence has higher reliability. The probe storage system is composed of three key MEMS devices: MEMS XYstage, linear motor and 1-D cantilever probe array with integrated heater. The design and fabrication process of three MEMS devices are given with prototypes. Their performances are discussed with the experimental results. The compact MEMS XY-stage device can be driven with ±20 lm movement, in X-and Ydirections. The miniature linear motor is smoothly driven to move back and forth at the speed of 20 mm/s and step of 150 lm by 150 mA pulse driving current. The indented (writing) bit size of 100 nm on polymer media is achieved by the prototyped cantilever probe tip with integrated heater.

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Section: Introductionmentioning

confidence: 99%

Probe recording technology using novel MEMS devices

et al. 2006

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“…Yuen Kuan Yong presented a flexure-based, piezoelectric stack-actuated XY nanopositioning to combine the ability to scan over a relatively large range (25μmX25μm) with high scanning speed [4]. Unfortunately, most of the existing micro positioning devices have no real-time force or position feedback which is crucial to in any closed-loop positioning systems [1][2][3][4][5][6][7]. Therefore, XY stage with integrated force sensor for micro-scale positioning, which could increase the accuracy Anti-Jamming Performance, requires further research.…”

Section: Introductionmentioning

confidence: 99%

Design of a compliant XY stage with embedded force sensor for micro-scale positioning

Liang

Zhang

Song

et al. 2010

The 2010 IEEE International Conference on Information and Automation

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This paper presents the development of a micro-scale positioning device based on two degrees of freedom (DOF) plane compliant parallel mechanism, which is featured by piezo-driven actuators and flexure joints, integrated force/torque sensor that capable of delivering 2-DOF motions with high precision and providing real-time force/torque or position information for feedback control. With optimization design, the proper parameters of the proposed structure and flexure joints are chosen. The stage possesses high precision and resolution, configurational simplicity and compactness. And the embedded sensor possesses the advantages such as, isotropic and high sensitivity.Index Terms -Flexure mechanism, micro-scale positioning, piezoelectric actuation, optimization design.

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“…In such systems, a large array of atomic-force-microscope (AFM) probes is used to write, read, and erase data on a storage medium carried by an scanning system [3]- [8], as depicted in Fig. 1.…”

Section: Introductionmentioning

confidence: 99%

A Vibration Resistant Nanopositioner for Mobile Parallel-Probe Storage Applications

Lantz

Rothuizen

Drechsler

et al. 2007

J. Microelectromech. Syst.

116

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We describe a planar microelectromechanical systems (MEMS)-based nanopositioner designed for parallel-probe storage applications. The nanopositioner is actuated electromagnetically and has motion capabilities of 60 m. The mechanical components are fabricated from a single-crystal silicon wafer using a deep-trench-etching process. To render the system robust against vibration, we utilize a mass-balancing concept that makes the system stiff against linear shock, but still compliant for actuation, and therefore results in low power consumption. We present details of the finite-element model used to design the device as well as experimental results for the frequency response, actuation, and vibration-rejection properties of the nanopositioner.[2006-0073]

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Design, Fabrication and Control of a Micro X-Y Stage with Large Ultra-Thin Film Recoding Media Platform

Cited by 13 publications

References 7 publications

Probe recording technology using novel MEMS devices

Probe recording technology using novel MEMS devices

Design of a compliant XY stage with embedded force sensor for micro-scale positioning

A Vibration Resistant Nanopositioner for Mobile Parallel-Probe Storage Applications

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