A new ultralow gate–drain charge (Q
GD) 4H-SiC trench MOSFET is presented and its mechanism is investigated by simulation. The novel MOSFET features double shielding structures (DS-MOS): one is the grounded split gate (SG), the other is the P+ shielding region (PSR). Both the SG and the PSR reduce the coupling effect between the gate and the drain, and transform the most part of the gate–drain capacitance (C
GD) into the gate–source capacitance (C
GS) and drain–source capacitance (C
DS) in series. Thus the C
GD is reduced and the proposed DS-MOS obtains ultralow Q
GD. Compared with the double-trench MOSFET (DT-MOS) and the conventional trench MOSFET (CT-MOS), the proposed DS-MOS decreases the Q
GD by 85% and 81%, respectively. Moreover, the figure of merit (FOM), defined as the product of specific on-resistance (R
on, sp) and Q
GD (R
on, sp
Q
GD), is reduced by 84% and 81%, respectively.
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